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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8877640 B1

PDFFull Text
Date of Patent:
Nov. 04, 2014

Filed:

Mar. 21, 2013

Cleaning solution and damascene process using the same

Applicant:

United Microelectronics Corporation, Hsinchu, TW;

Inventors:

An-Chi Liu, Tainan, TW;

Tien-Cheng Lan, New Taipei, TW;

Kuei-Hsuan Yu, New Taipei, TW;

Assignee:

United Microelectronics Corporation, Hsinchu, TW;

Attorney:

Ding Yu Tan

Primary Examiner:

Kyoung Lee

Int. Cl.
CPC ...
H01L 21/44 (2006.01); C11D 3/34 (2006.01); C11D 7/34 (2006.01); C11D 3/395 (2006.01); C11D 1/37 (2006.01); C11D 7/32 (2006.01); C11D 3/28 (2006.01); C11D 3/39 (2006.01); C11D 7/50 (2006.01); C11D 7/26 (2006.01); C11D 3/43 (2006.01); H01L 21/02 (2006.01); C11D 11/00 (2006.01); C11D 3/04 (2006.01); H01L 21/768 (2006.01); C11D 3/20 (2006.01); C11D 3/30 (2006.01);
U.S. Cl.
CPC ...
C11D 1/37 (2013.01); C11D 3/349 (2013.01); C11D 7/34 (2013.01); C11D 3/3953 (2013.01); C11D 7/3209 (2013.01); C11D 3/28 (2013.01); C11D 3/3945 (2013.01); C11D 7/5013 (2013.01); C11D 7/3218 (2013.01); C11D 7/265 (2013.01); C11D 3/43 (2013.01); H01L 21/02063 (2013.01); C11D 11/0047 (2013.01); C11D 3/3942 (2013.01); C11D 7/3245 (2013.01); C11D 3/042 (2013.01); H01L 218/31144 (2013.01); H01L 21/76814 (2013.01); C11D 3/3955 (2013.01); C11D 3/2082 (2013.01); C11D 3/30 (2013.01);
Abstract

A cleaning solution is provided. The cleaning solution includes an aliphatic polycarboxylic acid, a chain sulfonic acid substantially less than 4 wt % and an amine containing buffer agent.

Find Patent Forward Citations

Liu, An-Chi. (2014). Cleaning solution and damascene process using the same (U.S. Patent No. 8877640). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8877640

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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