Tien C Chang

Title: Tien C Chang: Innovator in Integrated Circuit Technology

Introduction

Tien C Chang is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of integrated circuit technology, holding a total of 2 patents. His work focuses on improving the manufacturing processes of integrated circuits, which are essential components in modern electronics.

Latest Patents

Chang's latest patents include a method for improving the adhesion of a deposited metal layer and a method to prevent silicide bubbles in the VLSI process. The first patent describes a technique where the surface of a partially manufactured integrated circuit is cleaned through successive immersions in specially formulated baths. This cleaning process ensures that metallic films deposited on these surfaces do not exhibit peeling or blistering, while also maintaining low electrical contact resistance. The second patent outlines a method for fabricating integrated circuits with polycide gate electrodes, ensuring no delamination of the overlying dielectric layer. This innovative approach involves a series of carefully controlled steps, including the use of specific reaction gases and annealing processes, to achieve high-quality polycide gate electrodes without defects.

Career Highlights

Tien C Chang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His expertise and innovative methods have contributed to advancements in integrated circuit manufacturing, enhancing the reliability and performance of electronic devices.

Collaborations

Chang has collaborated with notable colleagues, including Yung-Haw Liaw and Chia Shiung Tsai. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas within the field.

Conclusion

Tien C Chang's contributions to integrated circuit technology through his patents and work at Taiwan Semiconductor Manufacturing Company Limited highlight his role as a key innovator in the industry. His methods not only improve manufacturing processes but also enhance the overall quality of electronic components.