The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 1996
Filed:
Sep. 01, 1994
Applicant:
Inventors:
Chia S Tsai, Hsin Chu, TW;
Tien C Chang, Hsin Chu, TW;
Assignee:
Taiwan Semiconductor Manuf. Company, Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
1566571 ; 134-3 ; 134 28 ; 1566621 ; 427309 ; 437228 ; 437238 ;
Abstract
The surface of a partially manufactured integrated circuit is cleaned by successive immersions in a series of specially formulated baths. Metallic films deposited on surfaces that have been cleaned in this manner do not exhibit subsequent peeling or blistering and have low electrical contact resistance to the surface onto which they were deposited.