Location History:
- Reultingen, DE (2013)
- Reutlingen, DE (2013)
Company Filing History:
Years Active: 2013
Title: Innovations by Thorsten Mueller: Pioneering MEMS Technology
Introduction
Thorsten Mueller, an accomplished inventor based in Reutlingen, Germany, has made significant strides in the field of Micro-Electro-Mechanical Systems (MEMS). With a total of three patents to his name, his work primarily focuses on methods and technologies that enhance the functionality and reliability of MEMS devices.
Latest Patents
Thorsten Mueller’s latest patents showcase his innovative approach to MEMS technology. One of his noteworthy inventions is a method for capping a MEMS wafer, particularly aimed at sensor and actuator devices. This invention introduces a process where a movable mechanical functional element is fixed using a sacrificial layer. The innovation allows a cap layer to be epitaxially grown either on the sacrificial layer or on an intermediate layer applied to it. This method enhances the manufacturing and performance of MEMS devices.
Another key patent is related to a sensor for detecting thermal radiation. This sensor features a monolithically integrated structure that includes a carrier substrate, a cavity, and a sensor element suspended within the cavity. The design enables incident thermal radiation to effectively strike the sensor element via the carrier substrate, showcasing a new approach in thermal radiation detection.
Career Highlights
Thorsten Mueller has established himself as a leading innovator in his field while working at Robert Bosch GmbH. His contributions have not only enhanced the company's technological capabilities but have also significantly impacted the overall MEMS industry.
Collaborations
Mueller has collaborated with experts such as Joachim Rudhard and Ando Feyh, leveraging their collective expertise to advance MEMS technologies further. These collaborations highlight the importance of teamwork in driving innovation and the development of new technological solutions.
Conclusion
Thorsten Mueller's commitment to innovation in MEMS technology is evident through his patents and collaborative efforts. His inventions are paving the way for more efficient and effective MEMS devices, underscoring his role as a key figure in this dynamic field.