The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2013
Filed:
Jun. 25, 2009
Applicants:
Joachim Rudhard, Leinfelden-Echterdingen, DE;
Thorsten Mueller, Reultingen, DE;
Inventors:
Joachim Rudhard, Leinfelden-Echterdingen, DE;
Thorsten Mueller, Reultingen, DE;
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention relates to a method for capping a MEMS wafer (), in particular a sensor and/or actuator wafer, with at least one mechanical functional element (). According to the invention, it is provided that the movable mechanical functional element () is fixed by means of a sacrificial layer (), and that a cap layer () is applied to, in particular epitaxially grown onto, the sacrificial layer () and/or to at least one intermediate layer () applied to the sacrificial layer (). The invention also relates to a capped MEMS wafer ().