Company Filing History:
Years Active: 2021-2024
Title: Thomas Zeuner: Innovator in Semiconductor Lithography
Introduction
Thomas Zeuner is a notable inventor based in Jena, Germany. He has made significant contributions to the field of semiconductor lithography, particularly through his innovative patents. With a total of two patents to his name, Zeuner's work focuses on enhancing the precision and efficiency of inspection devices used in this critical technology.
Latest Patents
One of Thomas Zeuner's latest patents is an inspection device for masks used in semiconductor lithography. This invention includes an imaging device for capturing images of a mask and an image recording device. The device features one or more correction bodies that exhibit dispersive behavior for specific subranges of the illumination radiation utilized in imaging. Additionally, the patent outlines a method for addressing longitudinal chromatic aberrations in inspection devices. This method involves recording multiple images at different defocused positions and selecting a subset of these images to simulate the longitudinal chromatic aberration of a projection exposure apparatus.
Career Highlights
Thomas Zeuner is currently employed at Carl Zeiss SMT GmbH, a leading company in optical systems and semiconductor manufacturing technology. His work at this esteemed organization has allowed him to push the boundaries of innovation in the field of semiconductor lithography.
Collaborations
Throughout his career, Thomas Zeuner has collaborated with notable colleagues, including Holger Seitz and Heiko Feldmann. These collaborations have contributed to the advancement of technology in their shared field of expertise.
Conclusion
In summary, Thomas Zeuner is a distinguished inventor whose work in semiconductor lithography has led to significant advancements in inspection devices. His innovative patents and contributions to Carl Zeiss SMT GmbH highlight his commitment to enhancing technology in this vital industry.