Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl Zeiss Smt Gmbh (2 from 1,410 patents)
2 patents:
1. 11867642 - Inspection device for masks for semiconductor lithography and method
2. 10928332 - Inspection device for masks for semiconductor lithography and method