Thomas Werner Sorsch

Title: Thomas Werner Sorsch: Innovator in Semiconductor Technology

Introduction

Thomas Werner Sorsch is a notable inventor based in Edison, NJ (US). He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on processes that enhance device fabrication and improve thermal processing in semiconductor applications.

Latest Patents

Sorsch's latest patents include a process for device fabrication in which a layer of oxynitride is formed. This innovative process involves heating a silicon substrate in an N.sub.2 atmosphere to create a nitrided layer with a nitrogen content of at least about 5.times.10.sup.13 atoms/cm.sup.2. Following this, the substrate undergoes further oxidation in an oxygen-containing atmosphere to form a silicon oxynitride layer with a thickness of at least about 1 nm. Another significant patent is for a wafer holder designed for maintaining a semiconductor wafer at a constant temperature during film deposition. This wafer holder features quartz arms and supports that ensure uniform temperature distribution across the wafer during material layer deposition.

Career Highlights

Thomas Werner Sorsch has had a distinguished career at Lucent Technologies Inc., where he has applied his expertise in semiconductor technology. His innovative approaches have contributed to advancements in the industry, particularly in the areas of device fabrication and thermal processing.

Collaborations

Throughout his career, Sorsch has collaborated with esteemed colleagues such as Martin Laurence Green and Leonard Cecil Feldman. These collaborations have further enriched his work and contributed to the development of cutting-edge technologies in the semiconductor field.

Conclusion

Thomas Werner Sorsch is a prominent figure in semiconductor innovation, with a focus on enhancing device fabrication processes. His contributions through patents and collaborations have significantly impacted the industry, showcasing his dedication to advancing technology.