The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 1999
Filed:
Jul. 31, 1996
Martin Laurence Green, Summit, NJ (US);
Thomas Werner Sorsch, Edison, NJ (US);
Lucent Technologies Inc., Murray Hill, NJ (US);
Abstract
A wafer holder for maintaining a semiconductor wafer at a constant temperature during film deposition is disclosed. The wafer holder is configured to have one or more quartz arms. Affixed to each arm is at least one quartz support, whose top end is adapted for holding the semiconductor wafer. The top end of each support is tapered to have a diameter smaller than that of the quartz support and is optionally tapered to a point. A thermal mass element is optionally supported on the arms of the wafer holder, to keep uniform, the temperature at the perimeter of the wafer with respect to the rest of the semiconductor wafer during a material layer deposition. Also, a quartz backstop is optionally attached to each support arm to keep the semiconductor wafer positioned on top of the quartz supports when the wafer holder is rotated.