Thomas Michael Wolf

Title: Thomas Michael Wolf: Innovator in Semiconductor Technology

Introduction

Thomas Michael Wolf is a notable inventor based in Orlando, FL (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on innovative processes that enhance the manufacturing of integrated circuits.

Latest Patents

One of his latest patents is titled "Define via in dual damascene process." This invention includes a process for manufacturing an integrated circuit, which involves providing a substrate with a dielectric layer over a conductive material. The process continues with depositing a hardmask over the dielectric layer, applying a first photoresist, and photodefining a trench. The method includes etching the hard mask and partially etching the dielectric to form a trench, stripping the photoresist, and applying a second photoresist to photodefine a slit across the trench. The selective etching of the dielectric down to the underlying conductive material is crucial for forming connections to the underlying metal and creating integrated circuits.

Another significant patent is "Overlay metrology using scatterometry profiling." This method characterizes alignment overlay between two layers of a semiconductor wafer nondestructively. An incident beam of radiation is directed upon the wafer surface, and the properties of the resulting diffracted beam are analyzed. The spectrally or angularly resolved characteristics of the diffracted beam are related to the alignment of overlay features. A library of calculated diffraction spectra is established to model expected variations in overlay alignment, which aids in process control.

Career Highlights

Thomas Michael Wolf has built a successful career at Agere Systems Inc., where he has been instrumental in advancing semiconductor technologies. His innovative approaches have contributed to the efficiency and effectiveness of integrated circuit manufacturing.

Collaborations

Throughout his career, Thomas has collaborated with talented individuals such as Allen Yen and Cynthia C Lee. These collaborations have fostered an environment of innovation and creativity, leading to the development of groundbreaking technologies.

Conclusion

Thomas Michael Wolf is a distinguished inventor whose work in semiconductor technology has led to significant advancements in integrated circuit manufacturing. His patents reflect a deep understanding of complex processes and a commitment to innovation.