Location History:
- South Burlington, VT (US) (2000 - 2004)
- Fairfax, VT (US) (2006 - 2011)
Company Filing History:
Years Active: 2000-2011
Title: The Innovative Contributions of Thomas M. Wagner
Introduction
Thomas M. Wagner, an accomplished inventor based in Fairfax, Vermont, has made significant contributions to the field of technology with a total of seven patents to his name. His innovative work primarily focuses on advancing photoresist technology, which has essential applications in the semiconductor industry.
Latest Patents
One of Wagner's notable recent patents is a photoresist trimming process, wherein a specialized gas compound is developed to selectively remove resist foot or scum from the lower portions of the sidewalls of a photoresist. This trimmer compound not only strengthens the upper surface of the photoresist by hardening or toughening it but is also utilized in dry etching processes after trench formation in the photoresist. This innovation incorporates oxygen and at least one other gaseous oxide, including compounds like carbon monoxide (CO), sulfur monoxide (SO), and nitrogen monoxide (NO), showcasing Wagner's adeptness in enhancing photoresist functionality.
Career Highlights
Wagner’s career is marked by his tenure at the International Business Machines Corporation (IBM), where he has further honed his skills as an inventor. His contributions have played a pivotal role in advancing the capabilities of semiconductor manufacturing and improving the efficiency of etching processes in the industry.
Collaborations
Wagner has had the opportunity to work alongside talented colleagues such as Thomas Benjamin Faure and Shaun Crawford at IBM. These collaborations are reflective of the innovative spirit within IBM, as they foster creativity and drive technological advancements.
Conclusion
In conclusion, Thomas M. Wagner exemplifies the innovative spirit that drives progress in technology. His contributions, particularly in the realm of photoresist technology, are invaluable to the semiconductor industry. With his ongoing work and the collaborative environment at IBM, Wagner is set to continue making noteworthy advancements in the world of inventions.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.