The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2011
Filed:
Oct. 09, 2007
Shaun Crawford, Jericho, VT (US);
Cuc K. Huynh, Jericho, VT (US);
A. Gary Reid, Burlington, VT (US);
Adam C. Smith, Colchester, VT (US);
Thomas M. Wagner, Fairfax, VT (US);
Shaun Crawford, Jericho, VT (US);
Cuc K. Huynh, Jericho, VT (US);
A. Gary Reid, Burlington, VT (US);
Adam C. Smith, Colchester, VT (US);
Thomas M. Wagner, Fairfax, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A photoresist trimming gas compound is provided which will selectively remove a resist foot or scum from the lower portions of sidewalls of a photoresist. Additionally, the trimmer compound hardens or toughens an upper surface of the photoresist thereby strengthening the photoresist. The trimmer compound includes Oand at least one other gaseous oxide and is typically utilized in a dry etching process after a trench has been formed in a photoresist. The other oxide gases, in addition to the Omay include CO, SOand NO.