Thomas L Durant

Title: The Innovative Contributions of Thomas L. Durant

Introduction

Thomas L. Durant, an accomplished inventor based in Reading, Massachusetts, has made significant contributions to the field of semiconductor technology. With a focus on improving process chambers for semiconductor manufacturing, his inventive spirit has led to the development of a noteworthy patent that enhances the efficiency and effectiveness of wafer positioning mechanisms.

Latest Patents

Durant holds a patent for an "Apparatus for positioning an elevator tube." This innovative device features a wafer support position control mechanism that selectively positions a semiconductor wafer along an axis of excursion within a process chamber. The apparatus includes an elevator tube that protrudes through an orifice in the chamber surface, connecting to a wafer support at one end. A compliant, dynamic seal engages the elevator tube to create a gas curtain, effectively sealing the process chamber while allowing for precise adjustments. Furthermore, a moveable carriage is connected to the second distal end of the elevator tube, enabling controlled movement of the wafer support along the designated axis. Rigid mechanical structures ensure stability and reliability in this intricate system.

Career Highlights

Thomas L. Durant currently works with Axcelis Technologies, Inc., a prominent company in the field of semiconductor equipment. His affiliation with Axcelis highlights his commitment to advancing technology in semiconductor processing, showcasing his ability to translate innovative concepts into practical applications.

Collaborations

Throughout his career, Durant has had the opportunity to work alongside esteemed colleagues, including Michel Pharand and Ari Eiriksson. Collaborating with such talented individuals has not only enriched his professional experience but also stimulated creative solutions in their respective projects.

Conclusion

Thomas L. Durant's contributions to the world of semiconductor technology through his innovative patent for an elevator tube positioning apparatus underscore the importance of inventive thinking in advancing industrial processes. His work at Axcelis Technologies, alongside his invaluable collaborations, marks him as a significant figure in the field, driving forward the boundaries of technological innovation.