The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2006
Filed:
Aug. 22, 2003
Michel Pharand, Chelmsford, MA (US);
Thomas L. Durant, Reading, MA (US);
Ari Eiriksson, Brighton, MA (US);
Richard Gueler, Hamilton, MA (US);
Michel Pharand, Chelmsford, MA (US);
Thomas L. Durant, Reading, MA (US);
Ari Eiriksson, Brighton, MA (US);
Richard Gueler, Hamilton, MA (US);
Axcelis Technologies, Inc., Beverly, MA (US);
Abstract
A wafer support position control mechanism selectively positions a semiconductor wafer along an axis of excursion within a process chamber. An elevator tube protrudes through an orifice in the chamber surface and is connected at a first distal end to the wafer support. A compliant, dynamic seal within the orifice engages the elevator tube to form a gas curtain within a gap between the seal and the elevator tube to seal the process chamber. A moveable carriage is connected to the elevator tube at a second distal end for moving the wafer support along the axis of excursion. Rigid mechanical structure couples the second distal end of the elevator tube to the moveable carriage.