Company Filing History:
1 out of 1,410 
1 out of 83 Years Active: 2023
Title: Thomas Franz Karl Scheruebl: Innovator in Particle Removal Technology
Introduction
Thomas Franz Karl Scheruebl is a notable inventor based in Jena, Germany. He is recognized for his contributions to the field of projection exposure apparatus technology. His innovative approach to particle removal has garnered attention in the industry.
Latest Patents
Scheruebl holds a patent for a method designed to remove particles from a mask system. This method involves several key steps, including detecting the particle within the mask system, providing laser radiation, and ultimately removing the particle by irradiating it with laser radiation. The wavelength of the laser radiation is specifically chosen to match that of the radiation used by the projection exposure apparatus. This innovative technique enhances the efficiency and effectiveness of the mask system.
Career Highlights
Throughout his career, Scheruebl has worked with prominent companies in the optics and technology sectors. Notably, he has been associated with Carl Zeiss SMT GmbH and Carl Zeiss SMS Ltd. His work in these organizations has contributed to advancements in optical systems and technologies.
Collaborations
Scheruebl has collaborated with esteemed colleagues, including Sergey Oshemkov and Shao-Chi Wei. These partnerships have fostered innovation and development in their respective fields.
Conclusion
Thomas Franz Karl Scheruebl's contributions to the field of particle removal technology demonstrate his commitment to innovation and excellence. His patent and career achievements reflect his significant impact on the industry.