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San Jose, CA, United States of America

Thomas A Kamp

This inventor holds 3 USPTO granted patents. Top assignee: Lam Research Corporation. Active years: 2006-2010.

USPTO Granted Patents = 3

% Patents Active = 33.3

Average Co-Inventor Count = 4.0

ph-index = 2

Forward Citations = 6(Granted Patents)

Company Filing History:

Lam Research Corporation

Years Active: 2006-2010

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3 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 7682980 - Method to improve profile control and N/P loading in dual doped gate applications (2010-03-23),

2. 7186661 - Method to improve profile control and N/P loading in dual doped gate applications (2007-03-06),

3. 7098141 - Use of silicon containing gas for CD and profile feature enhancements of gate and shallow trench structures (2006-08-29),

Profile summary based on public USPTO records.

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