Thierry Chevolleau

Title: The Innovations of Thierry Chevolleau: A Trailblazer from Grenoble

Introduction

Thierry Chevolleau, an accomplished inventor based in Grenoble, France, holds an impressive portfolio of three patents. His innovative work in etching methods and bonding techniques showcases his commitment to advancing technology in his field.

Latest Patents

One of Chevolleau's latest patents is the "Multi-level autolimitating etching method." This method allows for the production of patterns that include inclined flanks on a substrate's surface. The process incorporates a protective mask that defines masked areas and an intermediate space. By plasma etching each masked area, a continuous passivation layer is formed on the inclined flanks, leading to autolimitation of the etching process as the flanks join together. This technique involves controlling the introduction of a gas that participates in the passivation layer's formation, enhancing the etching process's efficiency and precision.

Another significant patent by Chevolleau is the "Nitrogen-plasma surface treatment in a direct bonding method." This innovation focuses on bonding two plates, each possessing a thin layer of silicon or silicon oxide. The bonding process is initiated by subjecting one plate's thin layer to a surface treatment that creates a silicon oxynitride thin film. The treatment utilizes a nitrogen-based plasma and carefully controls voltage conditions to ensure a defect-free bonding interface, regardless of any subsequent heat treatment.

Career Highlights

Thierry Chevolleau has contributed significantly to his field through his collaborations at renowned institutions. He has worked with the Commissariat à l'Énergie Atomique et aux Énergies Alternatives and the Centre National de la Recherche Scientifique, where he honed his expertise and developed his patented technologies.

Collaborations

Throughout his career, Chevolleau has collaborated with talented professionals, including Olivier Desplats and Maxime Darnon. These collaborations have enriched his research and fostered innovations that push the boundaries of technology.

Conclusion

Thierry Chevolleau's work exemplifies the spirit of innovation that drives progress in technology. His patents, including advanced etching methods and bonding techniques, reflect his significant contributions to the field. As he continues to push the envelope of invention, Chevolleau remains a vital player in shaping the future of technology.