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San Jose, CA, United States of America

Theo Panagopoulos

USPTO Granted Patents = 7 (Patent Applications = 1)

Average Co-Inventor Count = 2.4

ph-index = 3

Forward Citations = 219(Granted Patents)

Location History:

San Jose, CA (US) (2012 - 2019)
Los Gatos, CA (US) (2020)

Company Filing History:

Lam Research Corporation

Years Active: 2012-2020

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7 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 10665435 - Chamber with vertical support stem for symmetric conductance and RF delivery (2020-05-26),

2. 10395902 - Chamber with vertical support stem for symmetric conductance and RF delivery (2019-08-27),

3. 10049862 - Chamber with vertical support stem for symmetric conductance and RF delivery (2018-08-14),

4. 9953843 - Chamber for patterning non-volatile metals (2018-04-24),

5. 9679751 - Chamber filler kit for plasma etch chamber useful for fast gas switching (2017-06-13),

6. 9011631 - Rapid and uniform gas switching for a plasma etch process (2015-04-21),

7. 8133349 - Rapid and uniform gas switching for a plasma etch process (2012-03-13),

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