This inventor holds 7 USPTO granted patents and 1 published patent application. Top assignee: Lam Research Corporation. Active years: 2012-2020.
Location History:
- San Jose, CA (US) (2012 - 2019)
- Los Gatos, CA (US) (2020)
Company Filing History:
Years Active: 2012-2020
Title: Innovations of Theo Panagopoulos
Introduction
Theo Panagopoulos is a notable inventor based in San Jose, CA (US). He has made significant contributions to the field of plasma technology, holding a total of 7 patents. His work focuses on enhancing conductance and uniformity within plasma chambers, which are crucial for various applications in semiconductor manufacturing.
Latest Patents
One of his latest patents is titled "Chamber with vertical support stem for symmetric conductance and RF delivery." This invention provides a plasma chamber designed to increase conductance and improve uniformity. The radio frequency (RF) path for supplying power to the plasma chamber is symmetric with respect to the center axis of the chamber. Additionally, the pumps used to remove materials from the plasma chamber are also symmetrically arranged. This design facilitates an increase in conductance uniformity within the plasma chamber, making it a significant advancement in the field.
Career Highlights
Theo Panagopoulos is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His innovative work has contributed to the development of advanced technologies that enhance manufacturing processes.
Collaborations
Throughout his career, Theo has collaborated with several talented individuals, including Daniel Arthur Brown and John Patrick Holland. These collaborations have fostered an environment of innovation and creativity, leading to the development of groundbreaking technologies.
Conclusion
Theo Panagopoulos is a distinguished inventor whose work in plasma technology has led to significant advancements in the field. His contributions, particularly in enhancing conductance and uniformity within plasma chambers, demonstrate his commitment to innovation and excellence.