Location History:
- Kikuyo-machi, JP (2009)
- Kikuchi-gun, JP (2009 - 2012)
- Koshi, JP (2013)
Company Filing History:
Years Active: 2009-2013
Title: Inventor Spotlight: Tetsushi Miyamoto
Introduction
Tetsushi Miyamoto, an innovative inventor hailing from Kikuchi-gun, Japan, has made significant contributions to the field of technology through his inventive prowess. With a total of five patents to his name, he continues to shape advancements in treatment methods and processing systems.
Latest Patents
Miyamoto's latest patents showcase his expertise in developing cutting-edge treatment systems. One notable invention is a method for developing a resist film on a substrate using a developing solution at a specified temperature lower than room temperature. This innovative process includes several steps: a first cooling step that involves cooling the substrate on a cooling plate, a second step where a rinse solution is supplied to further cool the substrate, a developing step for forming a resist pattern, and a final cleaning step to ensure the substrate's surface is pristine.
Another important patent is related to a coating and processing apparatus designed for efficient substrate treatment. This apparatus features a spin chuck that holds a quadrangular substrate while rotating it horizontally. It includes a coating solution nozzle for applying a coating solution and a solvent supply mechanism to ensure thorough cleaning of the substrate’s corners through centrifugal force. These inventions reflect Miyamoto's commitment to enhancing technological processes.
Career Highlights
Tetsushi Miyamoto is currently associated with Tokyo Electron Limited, a prominent player in the electronics sector. His role at the company highlights his dedication to advancing technology and innovation. Through his work, he has positioned himself as a key inventor in the development of efficient processing technologies.
Collaborations
Miyamoto collaborates with notable coworkers, including Shinji Kobayashi and Masahito Hamada. Together, they contribute to the innovative projects within their organization, fostering a dynamic environment that encourages the exchange of ideas and growth in the field of technology.
Conclusion
Through his inventive contributions, Tetsushi Miyamoto exemplifies the spirit of innovation. With a strong portfolio of patents and a commitment to advancing technology, he continues to inspire future inventors and enhance industrial processes that shape modern applications in technology. His work at Tokyo Electron Limited and collaborations with fellow inventors will undoubtedly continue to influence the world of inventions.