The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2009
Filed:
Mar. 09, 2004
Shinji Kobayashi, Kikuchi-gun, JP;
Tetsushi Miyamoto, Kikuchi-gun, JP;
Masahito Hamada, Kikuchi-gun, JP;
Masatoshi Kaneda, Kikuchi-gun, JP;
Shinji Kobayashi, Kikuchi-gun, JP;
Tetsushi Miyamoto, Kikuchi-gun, JP;
Masahito Hamada, Kikuchi-gun, JP;
Masatoshi Kaneda, Kikuchi-gun, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
There is provided a coating and processing apparatus including a spin chuck horizontally holding a quadrangular substrate and rotating the substrate in a horizontal plane, a coating solution nozzle for supplying a coating solution to a front surface of the substrate horizontally held by the spin chuck, and a solvent supply mechanism provided in the spin chuck for supplying a solvent to a back surface of the substrate, in which the solvent supplied to the back surface of the substrate is allowed to reach the back surface and side surface of each of corners of the substrate by centrifugal force, thereby removing the coating solution attached.