This inventor holds 3 USPTO granted patents and 2 published patent applications. Top assignee: Nuflare Technology, Inc.. Active years: 2009-2020.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Numazu, JP (2009)
- Yokohama, JP (2016 - 2020)
Company Filing History:
Years Active: 2009-2020
Title: Tetsuro Nishiyama: Innovator in Vacuum and Charged Particle Beam Technologies
Introduction
Tetsuro Nishiyama is a prominent inventor based in Yokohama, Japan. He has made significant contributions to the fields of vacuum technology and charged particle beam writing apparatuses. With a total of 3 patents to his name, Nishiyama continues to push the boundaries of innovation in his field.
Latest Patents
Nishiyama's latest patents include a vacuum apparatus and a charged particle beam writing apparatus. The vacuum apparatus features a chamber designed to be air-tight, equipped with a vacuum pump that efficiently exhausts gas from the chamber. An exhaustion structure is strategically placed between the chamber and the vacuum pump's inlet port, incorporating a ventilation path surrounded by the wall of the exhaustion structure. This design allows the vacuum pump to effectively remove gas from the chamber while a layer of thermal energy absorbing material is formed on part of the inner surface to absorb thermal radiation emitted from the vacuum pump's inlet port.
The charged particle beam writing apparatus includes a beam emitter that emits a charged particle beam, along with an aperture that has an opening through which the beam passes. Additionally, it features an aperture beam tube that acts as a thermally conductive member, and a heater that supplies heat to the aperture via the aperture beam tube. These innovations reflect Nishiyama's commitment to enhancing the efficiency and effectiveness of these technologies.
Career Highlights
Tetsuro Nishiyama is currently employed at Nuflare Technology, Inc., where he continues to develop cutting-edge technologies. His work has positioned him as a key figure in the advancement of vacuum and charged particle beam technologies.
Collaborations
Nishiyama collaborates with notable colleagues such as Yoshimasa Sanmiya and Kenji Ohtoshi. Their combined expertise contributes to the innovative projects at Nuflare Technology, Inc.
Conclusion
Tetsuro Nishiyama is a distinguished inventor whose work in vacuum and charged particle beam technologies has led to significant advancements in the field. His patents and collaborations highlight his dedication to innovation and excellence.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile