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Yokohama, Japan

Tetsuro Nishiyama

USPTO Granted Patents = 3 (Patent Applications = 2)

Average Co-Inventor Count = 1.8

ph-index = 1

Location History:

Numazu, JP (2009)
Yokohama, JP (2016 - 2020)

Company Filing History:

Nuflare Technology, Inc.

Years Active: 2009-2020

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3 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 10867769 - Vacuum apparatus and charged particle beam writing apparatus (2020-12-15),

2. 9449792 - Charged particle beam writing apparatus, aperture unit, and charged particle beam writing method (2016-09-20),

3. 7521689 - Deflector for equipment of electron beam lithography and equipment of electron beam lithography (2009-04-21),

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