The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2016
Filed:
Feb. 28, 2014
Applicant:
Nuflare Technology, Inc., Yokohama, JP;
Inventor:
Tetsuro Nishiyama, Yokohama, JP;
Assignee:
NuFlare Technology, Inc., Yokohama, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01J 37/317 (2006.01); H01J 37/09 (2006.01); H01L 21/263 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3174 (2013.01); H01J 37/09 (2013.01); H01L 21/2636 (2013.01); H01J 2237/022 (2013.01); H01J 2237/0451 (2013.01);
Abstract
A charged particle beam writing apparatus according to an embodiment includes: a beam emitter configured to emit a charged particle beam; an aperture having an opening portion through which the charged particle beam emitted by the beam emitter passes; an aperture beam tube being provided on a surface of the aperture and functioning as a thermally conductive member having thermal conductivity; and a heater provided on a surface of the aperture beam tube and configured to supply heat to the aperture via the aperture beam tube.