Tetsuri Matsuki

Title: Tetsuri Matsuki: Innovator in Plasma Processing Technology

Introduction

Tetsuri Matsuki is a notable inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology. His innovative work has led to the development of a unique plasma processing apparatus that enhances various industrial applications.

Latest Patents

Matsuki holds a patent for a plasma processing apparatus and method. This apparatus features a dielectric member with communication holes that connect an internal space to a processing space. It includes a first and second electrode, a first gas supply device for supplying a processing gas, and a high-frequency power supply that generates plasma. The design allows for precise control of radical and ion amounts, making it a valuable tool in plasma processing.

Career Highlights

Tetsuri Matsuki is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has been instrumental in advancing plasma processing technologies. With a focus on innovation, Matsuki continues to contribute to the development of cutting-edge solutions in his field.

Collaborations

Matsuki has collaborated with notable colleagues, including Koji Maruyama and Masato Horiguchi. Their combined expertise has fostered a creative environment that encourages the development of innovative technologies.

Conclusion

Tetsuri Matsuki's contributions to plasma processing technology exemplify the spirit of innovation. His patent and work at Tokyo Electron Limited highlight his commitment to advancing the field. Through collaboration and creativity, Matsuki continues to make a significant impact in the industry.