Location History:
- Tokyo, JP (1988 - 1998)
- Chiyoda-ku, JP (2004)
Company Filing History:
Years Active: 1988-2004
Title: The Innovations of Tetsuo Kikuchi
Introduction
Tetsuo Kikuchi, based in Tokyo, Japan, is a distinguished inventor known for his significant contributions to the field of semiconductor technology. With a remarkable portfolio of nine patents, Kikuchi has pioneered various innovations that enhance manufacturing processes and optical systems.
Latest Patents
Kikuchi's latest patents showcase his expertise in exposure apparatuses and semiconductor exposure devices. The exposure apparatus patent details a system that exposes a transfer pattern from a mask onto a photosensitive substrate. This innovative apparatus includes an illumination optical system designed to guide light efficiently, with an imaging optical system that forms a precise illumination area on the mask. A lens driving apparatus enhances the optical characteristics by adjusting the position of certain lenses along the optical axis.
Additionally, Kikuchi's semiconductor exposure device is notable for utilizing a mercury lamp as a light source, allowing for high throughput with exceptional output efficiency. The design integrates an advanced optical system that effectively illuminates a target surface while correcting chromatic aberration. The inclusion of a power source and control circuit assures optimal performance of the mercury lamp, demonstrating Kikuchi's attention to detail in improving semiconductor manufacturing.
Career Highlights
Kikuchi has achieved notable recognition during his career, particularly for his tenure at leading companies such as Nikon Corporation and Nippon Kogaku K.K. His technical expertise and innovative mindset have played a pivotal role in advancing the technologies employed in these organizations, contributing to their established reputation in the optics and semiconductor industries.
Collaborations
Throughout his career, Kikuchi has worked with esteemed colleagues, including Hiroshi Shirasu and Koichi Matsumoto. Their collaborative efforts have facilitated the development of cutting-edge technologies and have significantly impacted the advancement of semiconductor manufacturing processes.
Conclusion
In summary, Tetsuo Kikuchi is a prominent inventor whose contributions to exposure apparatuses and semiconductor devices reflect a deep understanding of optical technologies and manufacturing processes. With nine patents to his name, Kikuchi's work continues to influence contemporary practices in the industries he has served, showcasing the enduring impact of his innovations on the semiconductor landscape.