The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 1997
Filed:
Mar. 10, 1995
Nikon Corporation, , JP;
Abstract
The illumination device of the present invention is directed to an illumination device comprising a light source system for generating illumination light, a collimate optical system for collimating the illumination light from the light source system into a substantially collimated light beam, an optical integrator for forming a plurality of light source images on the basis of the light beam from the collimate optical system, a variable aperture stop arranged at an exit surface of the optical integrator, and a condenser lens system for guiding the light beam from the optical integrator to a surface of an object to be illuminated, and making an incident surface of the optical integrator conjugate with the surface of the object to be illuminated.