Company Filing History:
Years Active: 2012
Title: The Innovative Mind of Terry Sheng
Introduction: Terry Sheng is a remarkable inventor based in Saratoga, California. With a passion for innovation and a keen understanding of technology, she has made significant contributions to the field of electrostatic chucks. Her groundbreaking invention has garnered attention and showcases her talent in engineering and invention.
Latest Patents: Terry holds a patent for her invention titled "Step Down Dechucking." This method and apparatus for dechucking an electrostatic chuck reveals a process in which gas escapes through an opening between a wafer and a chuck during each stage of a multi-stage process. In this innovative approach, the chucking voltage is reduced to less than the threshold voltage needed to hold the wafer, allowing gas to push the wafer away from the chuck, thereby increasing the dechucking rate. This method is designed to minimize potential damages that might occur due to the wafer being pushed away, showcasing her dedication to safety and efficiency in her inventions.
Career Highlights: Terry is currently associated with Advanced Ion Beam Technology, Inc., where she continues to work on innovative projects that enhance manufacturing processes. With one patent to her name, she represents a blend of creativity and technical expertise that is vital in the rapidly advancing world of technology.
Collaborations: Throughout her career, Terry has collaborated with talented colleagues, including Peter Mok and Jason Hong. These partnerships have enabled her to explore new ideas and refine her inventions further, fostering an environment where creativity and collaboration thrive.
Conclusion: Terry Sheng’s work exemplifies the spirit of innovation that is essential in today's technological landscape. Her invention of the Step Down Dechucking process signifies her contributions to the industry and highlights the importance of collaboration and creativity. As she continues her journey in her field, Terry is sure to inspire future inventors and help advance the world of technology.