Kobe, Japan

Tatsuya Yasunaga


Average Co-Inventor Count = 7.2

ph-index = 2

Forward Citations = 28(Granted Patents)


Location History:

  • Hyogo-ken, JP (2000)
  • Kobe, JP (1994 - 2008)

Company Filing History:


Years Active: 1994-2008

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6 patents (USPTO):Explore Patents

Title: Tatsuya Yasunaga: Innovator in Semiconductor Technology

Introduction

Tatsuya Yasunaga is a prominent inventor based in Kobe, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. His innovative approaches have paved the way for advancements in the fabrication of semiconductor devices.

Latest Patents

One of Yasunaga's latest patents is a method for fabricating copper-based interconnections for semiconductor devices. This method involves depositing a thin film of copper or copper alloy on a dielectric film through sputtering. The dielectric film features trenches and/or via holes arranged on or above a substrate. The process includes high temperature and high pressure treatment to embed the copper or copper alloy into the trenches and/or via holes. Notably, the sputtering is conducted at a substrate temperature ranging from -20°C to 0°C, using a gaseous mixture of hydrogen gas and an inert gas in a ratio of 5:95 to 20:80.

Another significant patent is for a hard coating coated member that exhibits excellent wear resistance. This innovation highlights Yasunaga's commitment to enhancing the durability and performance of materials used in various applications.

Career Highlights

Throughout his career, Tatsuya Yasunaga has worked with notable companies, including Kabushiki Kaisha Kobe Seiko Sho and Kobe Steel, Ltd. His experience in these organizations has contributed to his expertise in semiconductor technology and materials science.

Collaborations

Yasunaga has collaborated with esteemed colleagues such as Yasuaki Sugizaki and Keiji Ueda. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Tatsuya Yasunaga's contributions to semiconductor technology and his innovative patents reflect his dedication to advancing the field. His work continues to influence the development of new technologies and materials, solidifying his reputation as a leading inventor in Japan.

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