Tatsuya Murofushi

Title: Tatsuya Murofushi: Innovator in Charged Particle Beam Technology

Introduction

Tatsuya Murofushi is a notable inventor based in Gotemba, Japan. He has made significant contributions to the field of charged particle beam technology. His innovative work has led to the development of advanced apparatuses and methods that enhance the precision of charged particle beam writing.

Latest Patents

Murofushi holds a patent for a "Charged particle beam writing apparatus and charged particle beam writing method." This invention includes a deflector that deflects a charged particle beam, along with a first and second correcting lens that adjust the focus position of the beam. The apparatus also features a focus correction amount calculator that determines the necessary adjustments based on changes in the sample surface height and shot size. The design incorporates digital to analog converter amplifiers that apply voltage corrections to the correcting lenses, ensuring optimal performance.

Career Highlights

Murofushi is currently employed at Nuflare Technology, Inc., where he continues to push the boundaries of charged particle beam technology. His work has been instrumental in advancing the capabilities of writing apparatuses used in various applications.

Collaborations

Murofushi collaborates with talented colleagues, including Takuya Uemura and Takashi Nakamura. Their combined expertise fosters an environment of innovation and creativity within their projects.

Conclusion

Tatsuya Murofushi's contributions to charged particle beam technology exemplify the spirit of innovation. His patent and ongoing work at Nuflare Technology, Inc. highlight his commitment to advancing this critical field.