Tatsuya Mizoi

Title: Tatsuya Mizoi: Innovator in Semiconductor Technology

Introduction

Tatsuya Mizoi is a prominent inventor based in Atsugi, Japan, known for his significant contributions to semiconductor technology. With a total of 10 patents to his name, Mizoi has made remarkable advancements in the manufacturing methods of silicon-on-insulator (SOI) substrates and semiconductor devices.

Latest Patents

Mizoi's latest patents include a manufacturing method of SOI substrate and a manufacturing method of semiconductor devices. The SOI substrate manufacturing method demonstrates a process that involves implanting hydrogen ions into a semiconductor substrate to create an ion implantation layer. This method allows for the bonding of the semiconductor substrate to a base substrate, such as glass, with a bonding layer in between. The substrates are then heated to separate the semiconductor substrate, leaving a thin semiconductor layer over the base substrate. The surface of this layer is irradiated with laser light to enhance its planarity and recover its crystallinity, ultimately allowing for the formation of an SOI substrate with a single-crystalline semiconductor layer of 100 nm or less in thickness.

The method of manufacturing semiconductor devices focuses on narrowing the space between semiconductor films transferred at multiple locations. This involves attaching a first bonding substrate with projections to a base substrate, separating it to form first semiconductor films, and then attaching a second bonding substrate with projections in different regions to form second semiconductor films. This innovative approach enhances the efficiency of semiconductor device manufacturing.

Career Highlights

Mizoi has established himself as a key figure in the semiconductor industry through his work at Semiconductor Energy Laboratory Co., Ltd. His expertise in semiconductor technology has led to numerous advancements that have impacted the field significantly.

Collaborations

Throughout his career, Mizoi has collaborated with notable colleagues, including Akihisa Shimomura and Hidekazu Miyairi. These collaborations have further enriched his work and contributed to the development of innovative semiconductor technologies.

Conclusion

Tatsuya Mizoi's contributions to semiconductor technology through his patents and innovative methods have positioned him as a leading inventor in the field. His work continues to influence advancements in semiconductor manufacturing, showcasing the importance of innovation in technology.