This inventor holds 9 USPTO granted patents. Top assignees: Fujitsu Corporation, Adv Antest Corporation. Active years: 1998-2002.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Kawasaki, JP (1998 - 2001)
- Tokyo, JP (1999 - 2002)
Company Filing History:
7 out of 39,374 
4 out of 2,281 
Years Active: 1998-2002
Title: Innovations of Tatsuro Ohkawa
Introduction
Tatsuro Ohkawa is a prominent inventor based in Kawasaki, Japan. He has made significant contributions to the field of charged particle beam exposure technology. With a total of 9 patents to his name, his work has advanced the capabilities of exposure apparatuses used in various applications.
Latest Patents
Ohkawa's latest patents include a charged particle beam exposure apparatus and an exposure method capable of highly accurate exposure in the presence of partial unevenness on the surface of the exposed specimen. This innovative apparatus is designed to detect partial unevenness and adjust the height of the specimen during exposure. It comprises a charged particle beam source, a beam shaper, a deflector, a projector, and a control unit that coordinates the exposure process. The apparatus also features a stage for moving the specimen and a height measuring unit that assesses the height distribution of the specimen.
Another notable patent is an electron beam exposure apparatus that allows for the detection of a sample's height with high accuracy. This apparatus includes an electron gun, a converging unit, a deflecting unit, and a movement mechanism for the sample. It also has a mark position detecting unit that identifies changes in reflected electrons, enabling precise calculations of the sample's height based on the positional relationship of marks on the sample.
Career Highlights
Throughout his career, Tatsuro Ohkawa has worked with notable companies such as Fujitsu Corporation and Advantest Corporation. His experience in these organizations has contributed to his expertise in developing advanced exposure technologies.
Collaborations
Ohkawa has collaborated with esteemed colleagues, including Kenichi Kawakami and Hiroshi Yasuda. Their combined efforts have furthered the development of innovative technologies in the field.
Conclusion
Tatsuro Ohkawa's contributions to charged particle beam exposure technology have made a significant impact in the industry. His innovative patents and collaborations highlight his dedication to advancing this field.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile