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Sagamihara, Japan

Tatsuhiro Okabe

This inventor holds 2 USPTO granted patents. Top assignee: Asm IP Holding B.v.. Active years: 2015-2017.

USPTO Granted Patents = 2

% Patents Active = 100.0

Average Co-Inventor Count = 2.0

ph-index = 2

Forward Citations = 994(Granted Patents)

Location History:

Sagamahira, JP (2015)
Sagamihara, JP (2017)

Company Filing History:

Asm IP Holding B.v.

Years Active: 2015-2017

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2 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 9556516 - Method for forming Ti-containing film by PEALD using TDMAT or TDEAT (2017-01-31),

2. 9142393 - Method for cleaning reaction chamber using pre-cleaning process (2015-09-22),

Profile summary based on public USPTO records.

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