Location History:
- Tokyo, JP (2011)
- Shinagawa-ku, JP (2015)
Company Filing History:
Years Active: 2011-2015
Title: The Innovations of Tarou Sugihara
Introduction
Tarou Sugihara is a notable inventor based in Shinagawa-ku, Japan. He has made significant contributions to the field of lithography, particularly in the development of immersion lithographic apparatuses. With a total of two patents to his name, Sugihara's work has had a profound impact on the technology used in semiconductor manufacturing.
Latest Patents
Sugihara's latest patents include an innovative immersion lithographic apparatus designed to rinse the outer contour of a substrate with an immersion space. This apparatus features at least one immersion space and an immersion system that partially fills the immersion space with a liquid. It is specifically configured to rinse part of the immersion space with a rinsing liquid before projecting a patterned beam of radiation onto a substrate. Another significant patent involves a substrate processing method that includes an exposure step where an immersion area of a first liquid is formed on a substrate. This method allows the substrate to be immersed in a second liquid before the exposure step, effectively reducing problems caused by adhesion marks during immersion exposure.
Career Highlights
Tarou Sugihara is currently employed at Nikon Corporation, a leading company in imaging and optical products. His work at Nikon has allowed him to push the boundaries of lithographic technology, contributing to advancements that are crucial for the semiconductor industry.
Collaborations
Throughout his career, Sugihara has collaborated with esteemed colleagues such as Katsushi Nakano and Masahiko Okumura. These collaborations have fostered an environment of innovation and have led to the development of cutting-edge technologies in the field.
Conclusion
Tarou Sugihara's contributions to lithography and his innovative patents have positioned him as a key figure in the semiconductor industry. His work continues to influence the development of advanced manufacturing techniques, ensuring that he remains a significant inventor in his field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.