This inventor holds 5 USPTO granted patents. Top assignees: Lam Research Corporation, Mitsubishi Materials Corporation, Ebara Corporation. Active years: 2001-2006.
Company Filing History:



Years Active: 2001-2006
Title: Tanlin K Dickey: Innovator in Semiconductor Technology
Introduction
Tanlin K Dickey is a prominent inventor based in Sunnyvale, CA, known for his contributions to semiconductor technology. He holds a total of 5 patents that showcase his innovative approach to improving processes in the semiconductor industry. His work has significantly impacted the efficiency and effectiveness of semiconductor manufacturing.
Latest Patents
One of his latest patents is the "Chemical mechanical polishing head assembly having floating wafer carrier and retaining ring." This invention provides a structure and method for achieving a uniformly polished or planarized substrate, such as a semiconductor wafer. It includes a polishing apparatus with a housing, a carrier for mounting the substrate, and a retaining ring that allows for relative movement to enhance polishing uniformity. Another notable patent is the "Wafer scrubbing brush core," which describes a brush core designed for substrate scrubbing. This invention allows for uniform delivery of fluid through the brush, improving the cleaning and preparation of various substrates, including semiconductor wafers.
Career Highlights
Throughout his career, Tanlin has worked with notable companies such as Mitsubishi Materials Corporation and Lam Research Corporation. His experience in these organizations has contributed to his expertise in semiconductor technologies and innovations.
Collaborations
Tanlin has collaborated with several professionals in the field, including Scott Chin and John J Geraghty. These collaborations have further enriched his work and contributed to advancements in semiconductor manufacturing processes.
Conclusion
Tanlin K Dickey is a significant figure in the realm of semiconductor technology, with a focus on innovations that enhance manufacturing processes. His patents reflect a commitment to improving the efficiency and effectiveness of semiconductor production.