Location History:
- Kawasaki, JA (1976)
- Kawasaki, JP (1980 - 1986)
Company Filing History:
Years Active: 1976-1986
Title: The Innovations of Tamotsu Karasawa
Introduction
Tamotsu Karasawa is a notable inventor based in Kawasaki, Japan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 3 patents. His work primarily focuses on enhancing the precision and efficiency of alignment and exposure apparatuses used in the production of semiconductor devices.
Latest Patents
Karasawa's latest patents include a focus adjustment mechanism in an alignment and exposure apparatus. This invention features a mask chuck for holding a mask, a wafer chuck for holding a wafer, and a projection optical system that projects the mask's image onto the wafer. It also incorporates a non-contact distance measuring gauge that measures the distance from a reference position to the wafer without making contact. The processing unit calculates data on the position within the depth of field of the projection optical system, allowing for precise adjustments to ensure the mask pattern is correctly focused on the wafer. Another significant patent is a printing apparatus designed for the manufacture of semiconductor circuit elements. This apparatus includes a fixed mirror imaging system and allows for the entire image of the mask to be formed on the wafer through an innovative design involving mirrors and integrated movement of the mask and wafer holders.
Career Highlights
Karasawa is currently employed at Canon Kabushiki Kaisha, a leading company in imaging and optical products. His work at Canon has allowed him to push the boundaries of technology in semiconductor manufacturing, contributing to advancements that enhance production capabilities.
Collaborations
Throughout his career, Karasawa has collaborated with esteemed colleagues such as Ichiro Kano and Hideki Yoshinari. These partnerships have fostered an environment of innovation and have led to the development of groundbreaking technologies in the semiconductor field.
Conclusion
Tamotsu Karasawa's contributions to the semiconductor industry through his innovative patents and collaborations highlight his role as a key figure in advancing technology. His work continues to influence the manufacturing processes that are essential for modern electronics.