Taku Yamada

Title: Taku Yamada: Innovator in Charged Particle Beam Technology

Introduction

Taku Yamada is a prominent inventor based in Kanagawa, Japan. He has made significant contributions to the field of charged particle beam technology, holding a total of 10 patents. His work focuses on improving the precision and efficiency of charged particle beam writing apparatuses and methods.

Latest Patents

Yamada's latest patents include a charged particle beam writing apparatus and a charged particle beam writing method, which aim to reduce the difference between a calculated amount of drift and an actual amount of drift. The charged particle beam writing apparatus features a deflector that adjusts the irradiation position of the charged particle beam with respect to a substrate. It also includes a shot data generator that creates shot data from writing data, a drift corrector that calculates the amount of drift, and a deflection controller that manages the deflection amount based on the shot data and correction information. Additionally, a dummy irradiation instructor is included to execute dummy irradiation during the writing process.

Another notable patent is the photoelectric-surface electron source, which consists of a glass substrate that focuses laser light toward a substrate main surface. This surface emits photoelectrons when it receives the focused laser light. The extraction electrode, fixed to the substrate main surface, extracts the photoelectrons and is designed to allow them to pass through electrode holes.

Career Highlights

Throughout his career, Taku Yamada has worked with several notable companies, including Nuflare Technology, Inc. and Matsushita Electric Industrial Co., Ltd. His experience in these organizations has contributed to his expertise in charged particle beam technology and innovation.

Collaborations

Yamada has collaborated with talented individuals such as Kota Iwasaki and Toshihiro Higuchi. These collaborations have likely enhanced his research and development efforts in the field.

Conclusion

Taku Yamada is a distinguished inventor whose work in charged particle beam technology has led to significant advancements. His patents reflect a commitment to innovation and precision in the field, making him a key figure in the industry.