This inventor holds 2 USPTO granted patents. Top assignees: Ebara Corporation, Kabushiki Kaisha Toshiba. Active years: 1996-1997.
Company Filing History:


Years Active: 1996-1997
Title: Takeyuki Ohdaira: Innovator in Semiconductor Technology
Introduction
Takeyuki Ohdaira is a notable inventor based in Fujisawa, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His innovative methods have advanced the manufacturing processes in this critical industry.
Latest Patents
Ohdaira's latest patents include a "Method for manufacturing wiring in groove - In a semiconductor device" and a "Semiconductor device and method for manufacturing the same." In these inventions, an insulating film is deposited on a silicon substrate, followed by the formation of a concave groove in the insulating film according to a predetermined wiring pattern. Titanium and palladium are deposited in sequence to create a titanium film and a palladium film. A silver film is then formed on the palladium film through electroplating, leading to the creation of a groove-shaped silver wiring layer by polishing. The structure is subsequently annealed at approximately 700°C, resulting in the formation of an intermetallic compound through alloying the titanium and palladium films. This process culminates in a burying type wiring layer with a resistance lower than that of aluminum, composed of the silver wiring layer and the intermetallic compound.
Career Highlights
Throughout his career, Takeyuki Ohdaira has worked with prominent companies such as Toshiba Corporation and Ebara Corporation. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in semiconductor technology.
Collaborations
Ohdaira has collaborated with notable coworkers, including Masahiro Miyata and Hirokazu Ezawa. Their collective expertise has fostered an environment of innovation and creativity in their projects.
Conclusion
Takeyuki Ohdaira's contributions to semiconductor technology through his patents and collaborations highlight his role as a significant inventor in the field. His innovative methods continue to influence the industry and pave the way for future advancements.