Takenobu Kobayashi

Title: Takenobu Kobayashi: Precision Measurement and Exposure Technology

Introduction

Takenobu Kobayashi is an inventor based in Utsunomiya, Japan. His work includes technologies for measuring surface positions and controlling exposure processes, and he is associated with Canon Kabushiki Kaisha. He is credited with 4 patents.

Latest Patents

Kobayashi’s recent patent work includes “Exposure Apparatus and Method of Manufacturing a Device.” The invention describes an exposure apparatus that measures the surface position of a substrate’s shot region using projected and reflected detection light. A controller coordinates the optical systems and detector, including discharging accumulated charges between measurements of successive shot regions.

Another patent, “Surface Position Measuring Method and Apparatus,” concerns measuring an object’s surface while it is scanned. The apparatus scans in opposite directions, records surface positions at corresponding detection points, establishes reference surfaces, and calculates direction-based corrections to improve measurement accuracy.

Career Highlights

Kobayashi’s listed inventions address precision measurement and exposure equipment, technologies relevant to manufacturing devices. His patent portfolio reflects a focus on detecting surface positions and accounting for measurement differences during scanning.

Collaborations

Kobayashi is associated with Canon Kabushiki Kaisha. Yuji Kosugi is identified as a coworker.

Conclusion

Takenobu Kobayashi’s patents focus on improving surface measurement and exposure processes, contributing to precision technologies used in device manufacturing.