Company Filing History:
Years Active: 2012-2020
Title: Takeki Kogawa: Innovator in Substrate Processing Technology
Introduction
Takeki Kogawa is an accomplished inventor based in Yokohama, Japan. He holds a total of three patents, showcasing his innovative contributions to the field of substrate processing technology. Kogawa's work integrates advanced methodologies for improving efficiency and precision in semiconductor and disc wafer processing.
Latest Patents
Among his latest innovations, Kogawa has developed a substrate processing apparatus and substrate processing method. This apparatus features a tank for storing treatment liquid and a liquid level pipe that governs the movement of the treatment liquid. It includes a liquid level sensor to detect liquid levels, an air supply pipe for gas provision, and a controller to monitor erroneous detection by the sensor.
Another noteworthy patent involves a disc wafer inspecting device and inspecting method. This device enhances precision inspection of processing regions on semiconductor wafers. It utilizes image capturing means to obtain images of the wafer's outer edge, and employs measuring means to track the radial position and edge-to-edge distances, generating comprehensive inspection information based on gathered data.
Career Highlights
As part of Shibaura Mechatronics Corporation, Kogawa has played a vital role in advancing substrate processing technologies. His patents reflect significant advancements in the semiconductor fabrication process, which are crucial for meeting the ever-increasing demands of technology.
Collaborations
Kogawa collaborates with notable coworkers, including Yoshinori Hayashi and Hideki Mori. This teamwork fosters an environment of innovation at Shibaura Mechatronics Corporation, allowing them to push the boundaries of technology in substrate processing.
Conclusion
Takeki Kogawa stands out in the field of innovative technology, particularly in substrate processing and wafer inspection methods. His inventive contributions, characterized by precision and efficiency, continue to shape the future of semiconductor manufacturing. As he develops new solutions and technologies, Kogawa's work has a promising impact on the industry.