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For the Inventor, By the Inventor

Chiba, Japan

Takehiko Komatsu

USPTO Granted Patents = 4

Average Co-Inventor Count = 5.3

ph-index = 4

Forward Citations = 374(Granted Patents)


Location History:

  • Santa Clara, CA (US) (2002)
  • Ichikawa Chiba, JP (2002)
  • Chiba, JP (2002 - 2003)

Company Filing History:

goldMedal4 out of 13,684 
 
Applied Materials, Inc.
 patents

Years Active: 2002-2003

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4 patents (USPTO):
1. 6613689 - Magnetically enhanced plasma oxide etch using hexafluorobutadiene (2003-09-02),
2. 6451703 - Magnetically enhanced plasma etch process using a heavy fluorocarbon etching gas (2002-09-17),
3. 6403491 - Etch method using a dielectric etch chamber with expanded process window (2002-06-11),
4. 6362109 - Oxide/nitride etching having high selectivity to photoresist (2002-03-26),
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