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Takehiko Iwanaga

USPTO Granted Patents = 10

Average Co-Inventor Count = 1.3

ph-index = 4

Forward Citations = 67(Granted Patents)

Location History:

Kawasaki, JP (1994)
Utsunomiya, JP (1996 - 1999)
Kituregawamachi, JP (2002)
Tochigi, JP (2004 - 2006)

Company Filing History:

10 out of 90,631

Canon Kabushiki Kaisha

Years Active: 1994-2006

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10 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 7072027 - Exposure apparatus, method of controlling same, and method of manufacturing devices (2006-07-04),

2. 7046336 - Scanning exposure apparatus (2006-05-16),

3. 6954259 - Scanning exposure apparatus (2005-10-11),

4. 6909372 - Power monitoring unit, control method therefor, and exposure apparatus (2005-06-21),

5. 6816239 - Exposure apparatus, method of controlling same, and method of manufacturing devices (2004-11-09),

6. 6788391 - Illumination device, exposure apparatus and exposure method (2004-09-07),

7. 6396562 - Microdevice manufacturing apparatus (2002-05-28),

8. 5920398 - Surface position detecting method and scanning exposure method using the (1999-07-06),

9. 5581348 - Surface inspecting device using bisected multi-mode laser beam and (1996-12-03),

10. 5347118 - Aligning method and apparatus detecting misalignment using image signals (1994-09-13),

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