The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2004
Filed:
Jun. 05, 2002
Applicant:
Inventor:
Takehiko Iwanaga, Tochigi, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 2/772 ; G03B 2/742 ;
U.S. Cl.
CPC ...
G03B 2/772 ; G03B 2/742 ;
Abstract
An illumination device for scanning exposure apparatus for carrying out exposure even when a movable stage is being accelerated and decelerated. The apparatus includes an illumination-distribution varying device for temporarily varying the illumination distribution of an illumination unit that is performing the exposure, wherein the illumination-distribution varying device has a function for varying the temporary change of the illumination distribution in conformity with a pattern for driving the movable stage.
Iwanaga, Takehiko. (2004). Illumination device, exposure apparatus and exposure method (U.S. Patent No. 6788391). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6788391
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile