Company Filing History:
Years Active: 2019-2022
Title: The Innovations of Takayuki Fukudome
Introduction
Takayuki Fukudome is a notable inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing technology. With a total of three patents to his name, Fukudome's work focuses on enhancing the efficiency and uniformity of heating processes in semiconductor manufacturing.
Latest Patents
Fukudome's latest patents include a substrate processing apparatus and a method for adjusting such apparatus. The substrate processing apparatus features multiple heating modules, each equipped with a table for placing substrates to be heated. Each table contains several heaters, which are independently controlled to heat specific zones of the substrate. This innovative design ensures that the integrated quantities of heat across the heated zones are consistent, both within each heating module and among different modules. His other patent addresses the uniformity of temperature rise across wafers, ensuring that the heating treatment is consistent and effective.
Career Highlights
Fukudome is currently employed at Tokyo Electron Limited, a leading company in the semiconductor equipment industry. His work has been instrumental in advancing the technology used in substrate processing, contributing to improved manufacturing processes.
Collaborations
Fukudome collaborates with esteemed colleagues such as Kenichi Shigetomi and Takeshi Saikusa. Their combined expertise fosters innovation and drives advancements in their field.
Conclusion
Takayuki Fukudome's contributions to substrate processing technology exemplify the importance of innovation in the semiconductor industry. His patents reflect a commitment to enhancing manufacturing efficiency and uniformity.