Takashi Hattori

Title: Takashi Hattori: Innovator in Etching Technology

Introduction

Takashi Hattori, based in Musashimurayama, Japan, is a prolific inventor known for his contributions to the field of etching technology. With an impressive portfolio of 35 patents, Hattori has made significant advancements that enhance manufacturing processes, particularly in semiconductor fabrication.

Latest Patents

Among his latest innovations, Hattori's etching method stands out. This method allows for the etching of a silicon oxide film with high accuracy and a superior selection ratio compared to a silicon nitride film. The process involves a detailed approach, where a film structure with vertically stacked silicon oxide and silicon nitride films is processed. By supplying a mixture of hydrogen fluoride and alcohol vapor into a processing chamber while maintaining the wafer at temperatures between −20° C. and −60° C., Hattori enables precise lateral etching of the silicon oxide film.

Another notable patent involves a scenario execution system that significantly improves log management. This system includes a scenario execution terminal, a log management device, and a storage component. The scenario execution unit handles the execution of scenario files, while the log management device records event data, ensuring efficient retrieval and storage of logs, which aids in operational transparency and accountability.

Career Highlights

Hattori's career has included key roles at renowned companies such as Hitachi, Ltd. and Renesas Technology Corporation. His work at these organizations has allowed him to hone his skills and collaborate on cutting-edge technologies that are essential to modern electronics.

Collaborations

Throughout his career, Takashi Hattori has worked alongside talented colleagues such as Hiroshi Shiraishi and Mutsuko Hatano. These collaborations have played a crucial role in refining Hattori's inventions and contributing to successful outcomes in various projects.

Conclusion

With a robust number of patents and an impressive track record in the semiconductor field, Takashi Hattori continues to push the boundaries of etching technology. His innovations not only improve manufacturing processes but also pave the way for future advancements in electronics. As he builds on his expertise, the industry eagerly anticipates the impact of his ongoing contributions.