Company Filing History:
Years Active: 2018-2025
Title: Takari Yamamoto: Innovator in Substrate Processing Technology
Introduction
Takari Yamamoto is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of six patents. His innovative work focuses on enhancing the efficiency and accuracy of substrate processing systems.
Latest Patents
Yamamoto's latest patents include a substrate processing system and a temperature control method. This substrate processing system features a chamber and a placing table designed to hold a substrate. The placing table incorporates a base and an electrostatic chuck with multiple division regions, each equipped with a heater. The system also includes a control device that measures the resistance value of the heaters, estimates the temperature of each division region, and controls the power supplied to the heaters accordingly. Another notable patent is the calibration method and system for infrared cameras. This method involves setting a placing table to various temperatures and measuring the radiation emitted from different zones using an infrared camera. The calibration process calculates differences in measurement values to establish an interpolation curve for accurate temperature readings.
Career Highlights
Takari Yamamoto is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has allowed him to develop cutting-edge technologies that improve substrate processing efficiency.
Collaborations
Yamamoto collaborates with talented coworkers, including Kenichiro Yamada and Kenichiro Nakamura. Their combined expertise contributes to the advancement of innovative solutions in substrate processing.
Conclusion
Takari Yamamoto's contributions to substrate processing technology through his patents and work at Tokyo Electron Limited highlight his role as a key innovator in the field. His advancements continue to influence the industry and pave the way for future innovations.