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For the Inventor, By the Inventor

Miyagi, Japan

Takari Yamamoto

This inventor holds 7 USPTO granted patents and 5 published patent applications. Top assignee: Tokyo Electron Limited. Active years: 2018-2025.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Takari Yamamoto. Retrieved from https://idiyas.com/inventor/takari-yamamoto

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 7 

% Patents Active = 100.0

Average Co-Inventor Count = 3.4

ph-index = 1

Forward Citations = 3(Granted Patents)


Company Filing History:

goldMedal7 out of 10,904 
 
Tokyo Electron Limited
 patents

Years Active: 2018-2025

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7 patents (USPTO):Explore Patents
1. 12474686 - Substrate processing apparatus and substrate processing method (2025-11-18),
2. 12142501 - Substrate processing system and temperature control method (2024-11-12),
3. 11019285 - Calibration method of infrared camera and calibration system of infrared camera (2021-05-25),
4. 10921773 - Temperature control method (2021-02-16),
5. 10139290 - Optical temperature sensor and method for manufacturing optical temperature sensor (2018-11-27),
6. 10139289 - Temperature measurement device, light emitting module and temperature measurement method (2018-11-27),
7. 9885612 - Optical temperature sensor and method of controlling same (2018-02-06),

Title: Takari Yamamoto: Innovator in Substrate Processing Technology

Introduction

Takari Yamamoto is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of six patents. His innovative work focuses on enhancing the efficiency and accuracy of substrate processing systems.

Latest Patents

Yamamoto's latest patents include a substrate processing system and a temperature control method. This substrate processing system features a chamber and a placing table designed to hold a substrate. The placing table incorporates a base and an electrostatic chuck with multiple division regions, each equipped with a heater. The system also includes a control device that measures the resistance value of the heaters, estimates the temperature of each division region, and controls the power supplied to the heaters accordingly. Another notable patent is the calibration method and system for infrared cameras. This method involves setting a placing table to various temperatures and measuring the radiation emitted from different zones using an infrared camera. The calibration process calculates differences in measurement values to establish an interpolation curve for accurate temperature readings.

Career Highlights

Takari Yamamoto is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has allowed him to develop cutting-edge technologies that improve substrate processing efficiency.

Collaborations

Yamamoto collaborates with talented coworkers, including Kenichiro Yamada and Kenichiro Nakamura. Their combined expertise contributes to the advancement of innovative solutions in substrate processing.

Conclusion

Takari Yamamoto's contributions to substrate processing technology through his patents and work at Tokyo Electron Limited highlight his role as a key innovator in the field. His advancements continue to influence the industry and pave the way for future innovations.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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