Takahiro Takumi

Title: Takahiro Takumi: Patent Inventor in Liquid Processing

Introduction

Takahiro Takumi is an inventor associated with Kumamoto, Japan, and Tokyo Electron Limited. His patent work addresses liquid processing systems used to process substrates and detect potential contamination in liquid flow paths. The available information lists 1 patent associated with him.

Latest Patents

Takumi is named on the patent “Liquid Processing Method, Liquid Processing Apparatus, and Storage Medium.” The invention describes a method that circulates processing liquid from a reservoir through a flow path and supplies it to a substrate. It also includes filling the flow path with liquid and allowing that liquid to remain before flowing it through the path.

During this process, a light irradiator directs light at the flow path, and a receiver detects light to produce a signal corresponding to foreign substances in the liquid. The system uses that signal to estimate an abnormal location in the flow path and present or carry out a response operation.

Career Highlights

The available details connect Takumi’s patent activity with Tokyo Electron Limited, a company involved in semiconductor manufacturing equipment. His listed invention focuses on monitoring liquid conditions and identifying possible abnormalities in processing equipment.

Collaborations

The patent record associates Takumi with Tokyo Electron Limited. No additional collaborators or co-inventors are specified in the information provided.

Conclusion

Takahiro Takumi’s listed patent reflects an engineering focus on liquid processing, contamination detection, and abnormality response in substrate-processing systems.