This inventor holds 5 USPTO granted patents and 12 published patent applications. Top assignees: Tokyo Electron Limited, Kyushu University. Active years: 2024-2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
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Years Active: 2024-2026
Title: The Innovative Contributions of Takahiro Shindo
Introduction
Takahiro Shindo is a notable inventor based in Yamanashi, Japan. He has made significant contributions to the field of plasma processing technology. With a total of three patents to his name, Shindo's work has advanced the capabilities of plasma processing apparatuses.
Latest Patents
Shindo's latest patents include a plasma processing apparatus and a plasma processing method. The first patent describes a plasma processing apparatus designed to perform plasma processing on a substrate. This apparatus features a processing chamber, a substrate support, a grounded lower electrode, and an upper electrode facing the lower electrode. It also includes a gas supply unit for processing gas and a radio frequency power supply to generate plasma. Additionally, a voltage waveform shaping unit is incorporated to suppress the positive voltage of the RF voltage applied to the upper electrode.
The second patent outlines a similar plasma processing apparatus, which consists of a chamber, a lower electrode, an upper electrode, and a gas supply. This design allows for the generation of plasma by applying a high-frequency voltage to the upper electrode. A circuit portion is also included to provide potential to the lower electrode, enhancing the efficiency of the plasma generation process.
Career Highlights
Takahiro Shindo is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at this company has allowed him to focus on innovative solutions in plasma processing technology.
Collaborations
Shindo collaborates with talented coworkers such as Tatsuo Matsudo and Yasushi Morita. Their combined expertise contributes to the advancement of technology in their field.
Conclusion
Takahiro Shindo's contributions to plasma processing technology through his patents and work at Tokyo Electron Limited highlight his role as an influential inventor. His innovative designs continue to shape the future of plasma processing applications.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile