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For the Inventor, By the Inventor

Kumamoto, Japan

Takahiro Kawazu

This inventor holds 5 USPTO granted patents and 4 published patent applications. Top assignee: Tokyo Electron Limited. Active years: 2018-2024.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Takahiro Kawazu. Retrieved from https://idiyas.com/inventor/takahiro-kawazu

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 5 

% Patents Active = 100.0

Average Co-Inventor Count = 3.3

ph-index = 1

Forward Citations = 2(Granted Patents)


Location History:

  • Kumamoto, JP (2018 - 2023)
  • Koshi, JP (2024)

Company Filing History:

goldMedal5 out of 10,918 
 
Tokyo Electron Limited
 patents

Years Active: 2018-2024

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5 patents (USPTO):Explore Patents
1. 11869780 - Substrate liquid processing apparatus (2024-01-09),
2. 11842904 - Control device and substrate processing method (2023-12-12),
3. 11295966 - Substrate processing method and substrate processing apparatus (2022-04-05),
4. 10985035 - Substrate liquid processing apparatus, substrate liquid processing method and computer readable recording medium having substrate liquid processing program recorded therein (2021-04-20),
5. 9887092 - Etching method, etching apparatus, and storage medium (2018-02-06),

Title: The Innovations of Takahiro Kawazu

Introduction

Takahiro Kawazu is a prominent inventor based in Kumamoto, Japan. He has made significant contributions to the field of substrate processing technology. With a total of 5 patents to his name, Kawazu continues to push the boundaries of innovation in his industry.

Latest Patents

Kawazu's latest patents include a substrate liquid processing apparatus and a control device for a substrate processing apparatus. The substrate liquid processing apparatus features a processing liquid storage unit that regulates the concentration of the processing liquid. It operates in two modes: a constant concentration mode and a concentration changing mode. The control device for the substrate processing apparatus is designed to store multiple records, each containing a recipe for substrate etching processing. It acquires a recipe at the start of the processing and executes it based on control values from the stored records.

Career Highlights

Kawazu is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work focuses on developing advanced technologies that enhance substrate processing efficiency and reliability. His innovative solutions have garnered attention and respect within the engineering community.

Collaborations

Kawazu collaborates with talented colleagues, including Hideaki Sato and Takashi Nagai. Together, they work on various projects that aim to improve substrate processing technologies and contribute to the advancement of the semiconductor industry.

Conclusion

Takahiro Kawazu's contributions to substrate processing technology are noteworthy and impactful. His innovative patents and collaborative efforts continue to shape the future of the industry.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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