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For the Inventor, By the Inventor

Miyagi, Japan

Takaharu Saino

This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignee: Tokyo Electron Limited. Active years: 2025-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Takaharu Saino. Retrieved from https://idiyas.com/inventor/takaharu-saino

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 2 

% Patents Active = 100.0

Average Co-Inventor Count = 5.1

ph-index = 1


Company Filing History:

goldMedal2 out of 10,904 
 
Tokyo Electron Limited
 patents

Years Active: 2025-2026

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2 patents (USPTO):Explore Patents
1. 12562352 - Prediction method and information processing apparatus for predicting the process result in a plasma etching process (2026-02-24),
2. 12381069 - Plasma processing apparatus and plasma processing method (2025-08-05),

Title: Takaharu Saino: Innovator in Plasma Processing Technology

Introduction

Takaharu Saino is a notable inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology. His innovative work has led to the development of a unique plasma processing apparatus that enhances the efficiency and effectiveness of plasma applications.

Latest Patents

Takaharu Saino holds a patent for a plasma processing apparatus and method. This apparatus includes a chamber, a plasma generator, multiple annular electromagnet units, a power source, at least one optical sensor, and a controller. The design features a plurality of annular electromagnet units that are arranged coaxially with respect to an axis passing through the internal space of the chamber. The optical sensor is responsible for detecting the emission intensity distribution of plasma along a radial direction within the chamber. The controller plays a crucial role by adjusting the currents supplied to the annular electromagnet units based on the detected emission intensity distribution. This innovation represents a significant advancement in plasma processing technology.

Career Highlights

Takaharu Saino is currently associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has allowed him to focus on developing cutting-edge technologies that push the boundaries of plasma processing.

Collaborations

Throughout his career, Takaharu has collaborated with talented individuals such as Akihiro Yokota and Ryo Terashima. These collaborations have fostered an environment of innovation and creativity, leading to advancements in their respective fields.

Conclusion

Takaharu Saino's contributions to plasma processing technology exemplify the spirit of innovation. His patent for a plasma processing apparatus showcases his commitment to advancing technology in this field. His work continues to influence the industry and inspire future innovations.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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