Location History:
- Miyagi, JP (2019)
- Yamanashi, JP (2021)
Company Filing History:
Years Active: 2019-2024
Title: Takaaki Kato - Innovator in Film Formation Technology
Introduction
Takaaki Kato is a distinguished inventor based in Yamanashi, Japan, known for his significant contributions to the fields of film formation methods and plasma processing technologies. With three patents to his name, Kato has demonstrated his commitment to advancing innovation in his industry.
Latest Patents
Kato's latest patents include a novel film formation method and a plasma processing apparatus. The film formation method involves adsorbing a precursor of a film-forming raw material gas onto a substrate's surface. This process is enhanced by irradiating the interior of a processing container with ultraviolet light aimed at separating a predetermined bond of the raw material gas. The method achieves the formation of a film layer by introducing a reaction gas into the processing container where the substrate is located.
His other recent patent, the plasma processing apparatus, innovatively uses an electromagnetic wave in a Very High Frequency (VHF) band of 100 MHz or higher to form a plasma. This apparatus features a ceiling wall that defines part of the chamber and includes a central conductor located in a hole formed at the ceiling's center. The alignment of the central conductor with the workpiece stage ensures efficient processing while maintaining optimal functionality.
Career Highlights
Takaaki Kato's career is marked by his role at Tokyo Electron Limited, a leader in the electronics manufacturing sector. His work at the company has positioned him as an essential contributor to evolving technologies related to semiconductor processing.
Collaborations
Kato collaborates with fellow innovators Toshihiko Iwao and Takahiro Hirano, whose collective expertise further enhances the advancements in their shared field. Working alongside such talented individuals has allowed Kato to expand his innovative horizons and influence cutting-edge developments.
Conclusion
In summary, Takaaki Kato has made remarkable strides in the realm of film formation and plasma processing technologies. His patents reflect a deep understanding of the requirements and complexities involved in modern manufacturing processes. Kato's innovative spirit and collaboration with esteemed colleagues signify a bright future for advancements in these technological arenas.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.