Foster City, CA, United States of America

Tai-Hon Philip Chang


Average Co-Inventor Count = 3.2

ph-index = 10

Forward Citations = 249(Granted Patents)


Company Filing History:


Years Active: 1999-2004

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15 patents (USPTO):Explore Patents

Title: Innovations of Tai-Hon Philip Chang

Introduction

Tai-Hon Philip Chang is a prominent inventor based in Foster City, California. He holds a total of 15 patents, showcasing his significant contributions to the field of technology and engineering. His work primarily focuses on advancements in electron detection and precision positioning systems.

Latest Patents

One of his latest patents is the "Tandem microchannel plate and solid state electron detector." This compact detector is designed for secondary and backscattered electrons in a scanning electron beam system. It features a microchannel plate detector and a solid state detector connected in tandem, offering large bandwidth and high dynamic range. This detector is applicable in various fields, including article inspection, lithography, and metrology. Its compact design makes it ideal for use in miniature electron beam columns, such as microcolumns.

Another notable patent is the "High precision flexure stage." This invention provides a positioning stage that allows for precise positioning of an object within a limited travel range, such as 100 micrometers. The stage can be utilized to position an electron source, like a field emitter, in an electron beam microcolumn. It includes a block that defines channels for flexure along two perpendicular axes, enabling accurate positioning through the use of actuators.

Career Highlights

Throughout his career, Tai-Hon Philip Chang has worked with notable companies, including Etec Systems, Inc. and Applied Materials, Inc. His experience in these organizations has contributed to his expertise in developing innovative technologies.

Collaborations

Some of his coworkers include Marian Mankos and Kim Yang Lee, who have collaborated with him on various projects.

Conclusion

Tai-Hon Philip Chang's contributions to the field of technology through his patents and innovations highlight his role as a leading inventor. His work continues to influence advancements in electron detection and precision positioning systems.

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